Speaking in a news conference on Monday, Foreign Ministry spokesman Saeed Khatibzadeh said that multiple sources confirmed "the Zionist regime was behind this" and that Iran's response would be one of "revenge".
"All of the centrifuges that went out of circuit at Natanz site were of the IR-1 type," he said, referring to Iran's first generation of enrichment machines more vulnerable to outages.
He added that Iran would replace damaged uranium enrichment centrifuges in Natanz with advanced ones.
Iran's semi-official Nournews website said the person who caused an electricity outage in one of the production halls at the underground uranium enrichment plant had been identified. "Necessary measures are being taken to arrest this person," the website reported, without giving details about the person.
Iranian authorities described the incident a day earlier as an act of "nuclear terrorism" and said Tehran reserved the right to take action against the perpetrators.
Multiple Israeli media outlets have quoted unnamed intelligence sources as saying the country's Mossad spy service carried out a successful sabotage operation at the underground Natanz complex, potentially setting back enrichment work there by months. Israel has not formally commented on the incident.
The incident occurred amid diplomatic efforts by Iran and the United States to revive Tehran's 2015 nuclear deal with major powers, an accord Israel fiercely opposed, after former U.S. President Donald Trump abandoned it three years ago.
Last week, Iran and the global powers held what they described as "constructive" talks to salvage the deal, which has unraveled as Iran has breached its limits on sensitive uranium enrichment since Trump re-imposed harsh sanctions on Tehran.